Charakterisierung von Nanopartikeln in CMP-Slurries der...

Charakterisierung von Nanopartikeln in CMP-Slurries der Halbleiterindustrie

T. Kuntzsch, M. Hollatz, M. Stintz, S. Ripperger
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Volume:
74
Year:
2002
Language:
german
Pages:
2
DOI:
10.1002/1522-2640(200205)74:53.0.co;2-7
File:
PDF, 57 KB
german, 2002
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