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Effect of Sputtering Target Power on Preferred Orientation in nc-TiN/a-SiNx Nanocomposite Thin Films
Zhang, Sam, Sun, Deen, Fu, Yongqing, Du, H., Zhang, QingVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Metastable and Nanocrystalline Materials
DOI:
10.4028/www.scientific.net/JMNM.23.175
File:
PDF, 208 KB
english, 2005