[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - A New Micro-Four-Point Probe Design for Various Applications
Kim, Ji-Kwan, Zhang, Yan, Lee, Dong-WeonYear:
2009
Language:
english
DOI:
10.1109/MEMSYS.2009.4805325
File:
PDF, 2.43 MB
english, 2009