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Kinetic properties of TiN thin films prepared by reactive magnetron sputtering
Solovan, M. N., Brus, V. V., Maryanchuk, P. D., Kovalyuk, T. T., Rappich, J., Gluba, M.Volume:
55
Language:
english
Journal:
Physics of the Solid State
DOI:
10.1134/S1063783413110255
Date:
November, 2013
File:
PDF, 355 KB
english, 2013