Characterization of growing thin films by in situ...

Review of Scientific Instruments 1985 Vol. 56; Iss. 11

Characterization of growing thin films by in situ ellipsometry, spectral reflectance and transmittance measurements, and ion-scattering spectroscopy

Netterfield, R. P., Martin, P. J., Sainty, W. G., Duffy, R. M., Pacey, C. G.
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Volume:
56
Year:
1985
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1138408
File:
PDF, 805 KB
english, 1985
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