Structural, mechanical, electrical and wetting properties...

Structural, mechanical, electrical and wetting properties of ZrNx films deposited by Ar/N2 vacuum arc discharge: Effect of nitrogen partial pressure

Abdallah, B., Naddaf, M., A-Kharroub, M.
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Volume:
298
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.01.003
Date:
March, 2013
File:
PDF, 898 KB
english, 2013
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