Effects of pulsed bias duty ratio on microstructure and...

Vacuum 2013 / 3 Vol. 89

Effects of pulsed bias duty ratio on microstructure and surface properties of TiN films

Yongqiang, Wei, Xiaoxia, Chen, Xiubo, Tian, Chunzhi, Gong, Shiqin, Yang, Zhiqiang, Jiang, Liangji, Chen
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Volume:
89
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.04.016
Date:
March, 2013
File:
PDF, 764 KB
english, 2013
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