Low temperature wet etching to reveal sub-surface damage in...

Applied Surface Science 2013 / 05 Vol. 273

Low temperature wet etching to reveal sub-surface damage in sapphire substrates

Kumar, Purushottam, Lee, Jinhyung, Lee, Gwangwon, Rao, Suhas, Singh, Deepika, Singh, Rajiv K.
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Volume:
273
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.01.137
Date:
May, 2013
File:
PDF, 616 KB
english, 2013
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