Kinetic Modeling of Temperature Dependence of TiCl...

Industrial & Engineering Chemistry Research 2009 / 02 Vol. 48; Iss. 3

Kinetic Modeling of Temperature Dependence of TiCl 4 and NH 3 Surface Reaction in Trap Systems for CVD Reactors

Pang, Changhyun, Jeong, Donghun, Chae, Heeyeop, Lee, Seungil, Cho, Che Hoo
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Volume:
48
Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/ie800729y
Date:
February, 2009
File:
PDF, 1013 KB
english, 2009
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