Stress mapping on the porous silicon microcapsules by Raman...

Stress mapping on the porous silicon microcapsules by Raman microscopy

Naumenko, D., Snitka, V., Duch, M., Torras, N., Esteve, J.
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Volume:
98
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.07.089
Date:
October, 2012
File:
PDF, 706 KB
english, 2012
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