![](/img/cover-not-exists.png)
Film growth model of atomic layer deposition for multicomponent thin films
Kim, Jin-Hyock, Kim, Ja-Yong, Kang, Sang-WonVolume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1883728
File:
PDF, 405 KB
english, 2005