A strategy for increased carbon ionization in magnetron...

Diamond and Related Materials 2012 / 3 Vol. 23

A strategy for increased carbon ionization in magnetron sputtering discharges

Aijaz, Asim, Sarakinos, Kostas, Lundin, Daniel, Brenning, Nils, Helmersson, Ulf
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Volume:
23
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2011.12.043
Date:
March, 2012
File:
PDF, 385 KB
english, 2012
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