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Interface-controlled high dielectric constant Al2O3/TiOx nanolaminates with low loss and low leakage current density for new generation nanodevices
Lee, Geunhee, Lai, Bo-Kuai, Phatak, Charudatta, Katiyar, Ram S., Auciello, OrlandoVolume:
114
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4811810
File:
PDF, 1.45 MB
english, 2013