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[IEEE 2006 European Solid-State Device Research Conference - Montreux, Switzerland (2006.09.19-2006.09.21)] 2006 European Solid-State Device Research Conference - Above IC integrated SrTiO3 high K MIM capacitors
Defay, Emmanuel, Wolozan, David, Garrec, Pierre, Andre, Bernard, Ulmer, Laurent, Aid, Marc, Blanc, Jean-pierre, Serret, Emmanuelle, Delpech, Philippe, Giraudin, Jean-christophe, Guillan, Julie, PellisYear:
2006
Language:
english
DOI:
10.1109/ESSDER.2006.307669
File:
PDF, 665 KB
english, 2006