Fabrication and characterization of PZT/TiO...

Integrated Ferroelectrics 2001 / 02 Vol. 35; Iss. 1-4

Fabrication and characterization of PZT/TiO x /SiO 2 /SiN x /SiO 2 /Si structure for acousto-optic device applications

Lee, Changho, Lee, Changseung, Liu, Junye, Jeon, Youngbae, No, Kwangsoo
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Volume:
35
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108016882
Date:
February, 2001
File:
PDF, 614 KB
english, 2001
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