![](/img/cover-not-exists.png)
[IEEE 2011 IEEE International SOI Conference - Tempe, AZ, USA (2011.10.3-2011.10.6)] IEEE 2011 International SOI Conference - Strain reduction in Silicon-on-Sapphire by wafer bonding
Imthurn, G.P., Miscione, A.M., Landry, K., Vaufredaz, A., Barge, T., Lagahe-Blanchard, C.Year:
2011
Language:
english
DOI:
10.1109/SOI.2011.6081706
File:
PDF, 752 KB
english, 2011