[IEEE 2011 IEEE International SOI Conference - Tempe, AZ,...

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[IEEE 2011 IEEE International SOI Conference - Tempe, AZ, USA (2011.10.3-2011.10.6)] IEEE 2011 International SOI Conference - Strain reduction in Silicon-on-Sapphire by wafer bonding

Imthurn, G.P., Miscione, A.M., Landry, K., Vaufredaz, A., Barge, T., Lagahe-Blanchard, C.
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Year:
2011
Language:
english
DOI:
10.1109/SOI.2011.6081706
File:
PDF, 752 KB
english, 2011
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