![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 25 August 2013)] Nanoepitaxy: Materials and Devices V - Wide band antireflection coatings deposited by atomic layer deposition
Jewell, April D., Hennessy, John, Hoenk, Michael E., Nikzad, Shouleh, Kobayashi, Nobuhiko P., Talin, A. Alec, Davydov, Albert V., Islam, M. SaifVolume:
8820
Year:
2013
Language:
english
DOI:
10.1117/12.2025198
File:
PDF, 3.01 MB
english, 2013