Control strategies for thermal budget and temperature...

Control strategies for thermal budget and temperature uniformity in spike rapid thermal processing systems

Jeng, Jyh-Cheng, Chen, Wen-Chung
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Volume:
57
Language:
english
Journal:
Computers & Chemical Engineering
DOI:
10.1016/j.compchemeng.2013.01.003
Date:
October, 2013
File:
PDF, 1.05 MB
english, 2013
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