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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Nanophotonics - Self-assembled Ni nanodot on SiO2 film: a novel reactive ion etching mask for Si nanopillar formation on Si substrate
Lin, Huang-Shen, Kao, Chih-Chiang, Kuo, Hao-Chung, Wang, Shing-Chung, Lin, Gong-Ru, Andrews, David L., Nunzi, Jean-Michel, Ostendorf, AndreasVolume:
6195
Year:
2006
Language:
english
DOI:
10.1117/12.663339
File:
PDF, 2.62 MB
english, 2006