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Modification of diamond film growth by a negative bias voltage in microwave plasma chemical vapor deposition
Schreck, M., Baur, T., Fehling, R., Müller, M., Stritzker, B., Bergmaier, A., Dollinger, G.Volume:
7
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(97)00260-4
Date:
February, 1998
File:
PDF, 1.24 MB
english, 1998