Low temperature limits of diamond film growth by microwave...

Diamond and Related Materials 1996 / 4 Vol. 5; Iss. 3-5

Low temperature limits of diamond film growth by microwave plasma-assisted CVD

Stiegler, J., Lang, T., Nyga˚rd-Ferguson, M., von Kaenel, Y., Blank, E.
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Volume:
5
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(95)00349-5
Date:
April, 1996
File:
PDF, 940 KB
english, 1996
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