Analysis of radial distribution of plasma parameters in a...

Analysis of radial distribution of plasma parameters in a coaxial-line microwave discharge tube

Kato, Isamu, Hara, Shinji, Wakana, Shin-ichi
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Volume:
54
Year:
1983
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332798
File:
PDF, 512 KB
english, 1983
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