Deposition of CrSiN/AlTiSiN nano-multilayer coatings by...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2013 / 7 Vol. 307

Deposition of CrSiN/AlTiSiN nano-multilayer coatings by multi-arc ion plating using gas source silicon

Yan, Shaojian, Fu, Tongcheng, Wang, Ruyi, Tian, Canxin, Wang, Zesong, Huang, Zhihong, Yang, Bing, Fu, Dejun
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Volume:
307
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2013.01.084
Date:
July, 2013
File:
PDF, 727 KB
english, 2013
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