The influence of hydrogen ion bombardment on...

Diamond and Related Materials 2003 / 2 Vol. 12; Iss. 2

The influence of hydrogen ion bombardment on plasma-assisted hydrocarbon film growth

Hopf, C, von Keudell, A, Jacob, W
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Volume:
12
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(03)00007-4
Date:
February, 2003
File:
PDF, 102 KB
english, 2003
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