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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Miniature low-cost extrinsic Fabry-Perot interferometer for low-pressure detection
Poeggel, Sven, Lehmann, Peter H., Osten, Wolfgang, Tosi, Daniele, Leen, Gabriel, Albertazzi, Armando, Lewis, ElfedVolume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2019799
File:
PDF, 582 KB
english, 2013