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Chemical Mechanical Polishing Slurries for Chemically Vapor-Deposited Diamond Films
Yuan, Zewei, Jin, Zhuji, Zhang, Youjun, Wen, QuanVolume:
135
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.4024034
Date:
July, 2013
File:
PDF, 2.83 MB
english, 2013