Influence of HPPMS pulse length and inert gas mixture on...

Thin Solid Films 2013 / 12 Vol. 549

Influence of HPPMS pulse length and inert gas mixture on the properties of (Cr,Al)N coatings

Bagcivan, N., Bobzin, K., Grundmeier, G., Wiesing, M., Ozcan, O., Kunze, C., Brugnara, R.H.
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Volume:
549
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.06.036
Date:
December, 2013
File:
PDF, 934 KB
english, 2013
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