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Ultra-thin poly-crystalline TiN films grown by HiPIMS on MgO(100) — In-situ resistance study of the initial stage of growth
Shayestehaminzadeh, S., Tryggvason, T.K., Magnus, F., Olafsson, S., Gudmundsson, J.T.Volume:
549
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.07.074
Date:
December, 2013
File:
PDF, 817 KB
english, 2013