Wet etching of hydrogenated amorphous carbon films
Jaramillo, J.M, Mansano, R.D, Zambom, L.S, Massi, M, Maciel, H.SVolume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00584-7
Date:
March, 2001
File:
PDF, 213 KB
english, 2001