PECVD of hydrogenated diamond-like carbon films from CH4–Ar...

Diamond and Related Materials 2004 / 4 Vol. 13; Iss. 4-8

PECVD of hydrogenated diamond-like carbon films from CH4–Ar mixtures: growth chemistry and material characteristics

Cicala, G., Bruno, P., Losacco, A.M.
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Volume:
13
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2003.10.049
Date:
April, 2004
File:
PDF, 138 KB
english, 2004
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