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SPIE Proceedings [SPIE International Conference on Micro-and Nano-Electronics 2012 - Zvenlgorod, Russian Federation (Monday 1 October 2012)] International Conference Micro- and Nano-Electronics 2012 - Formation of nanoscale structures by inductively coupled plasma etching
Welch, Colin C., Olynick, Deirdre L., Liu, Zuwei, Holmberg, Anders, Peroz, Christophe, Robinson, Alex P. G., Henry, M. David, Scherer, Axel, Mollenhauer, Thomas, Genova, Vince, Ng, Doris K. T., OrlikoVolume:
8700
Year:
2013
Language:
english
DOI:
10.1117/12.2017609
File:
PDF, 2.08 MB
english, 2013