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The effect of duty cycle on the microstructure and properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering
Wang, Yongjun, Li, Hongxuan, Ji, Li, Zhao, Fei, Liu, Xiaohong, Kong, Qinghua, Wang, Yongxia, Quan, Weilong, Zhou, Huidi, Chen, JianminVolume:
43
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/43/50/505401
Date:
December, 2010
File:
PDF, 1.26 MB
english, 2010