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The properties of fluorine-containing diamond-like carbon films prepared by pulsed DC plasma-activated chemical vapour deposition
Bendavid, A., Martin, P.J., Randeniya, L., Amin, M.S., Rohanizadeh, R.Volume:
19
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2010.10.001
Date:
December, 2010
File:
PDF, 650 KB
english, 2010