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Diamond deposition at low temperature by using CH4/H2 gas mixture
Dong, Lifang, Ma, Boqin, Dong, GuoyiVolume:
11
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(02)00140-1
Date:
September, 2002
File:
PDF, 324 KB
english, 2002