Influence of sputtering pressure on the structural, optical...

Influence of sputtering pressure on the structural, optical and hydrophobic properties of sputtered deposited HfO2 coatings

Dave, V., Dubey, P., Gupta, H.O., Chandra, R.
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Volume:
549
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.07.016
Date:
December, 2013
File:
PDF, 858 KB
english, 2013
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