Electrothermal tuning of Al–SiC nanomechanical resonators

Electrothermal tuning of Al–SiC nanomechanical resonators

Jun, Seong Chan, Huang, X M H, Manolidis, M, Zorman, C A, Mehregany, M, Hone, J
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Volume:
17
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/17/5/057
Date:
March, 2006
File:
PDF, 431 KB
english, 2006
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