Magnetron sputter deposited tantalum and tantalum nitride...

Magnetron sputter deposited tantalum and tantalum nitride thin films: An analysis of phase, hardness and composition

Bernoulli, D., Müller, U., Schwarzenberger, M., Hauert, R., Spolenak, R.
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Volume:
548
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.09.055
Date:
December, 2013
File:
PDF, 562 KB
english, 2013
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