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Thin films generated by plasma immersion ion implantation and deposition of hexamethyldisilazane mixed with nitrogen in different proportions
Kodaira, F V P, Mota, R P, Hills, V A, Honda, R I, Kayama, M E, Kostov, K G, Algatti, M AVolume:
370
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/370/1/012028
Date:
June, 2012
File:
PDF, 566 KB
english, 2012