Preparation and characterization of hydrogenated...

Journal of Physics D Applied Physics 2003 / 12 Vol. 36; Iss. 24

Preparation and characterization of hydrogenated diamond-like carbon films in a dual DC-RF plasma system

Li, Hongxuan, Xu, Tao, Chen, Jianmin, Zhou, Huidi, Liu, Huiwen
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Volume:
36
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/36/24/014
Date:
December, 2003
File:
PDF, 329 KB
english, 2003
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