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Mass spectrometric investigations on plasmas obtained from a dual electron cyclotron resonance-radio frequency discharge
Zarrabian, M, Leteinturier, C, Turban, GVolume:
7
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/7/4/018
Date:
November, 1998
File:
PDF, 279 KB
english, 1998