3-D Statistical Simulation Comparison of Oxide Reliability...

3-D Statistical Simulation Comparison of Oxide Reliability of Planar MOSFETs and FinFET

Gerrer, Louis, Amoroso, Salvatore Maria, Markov, Stanislav, Adamu-Lema, Fikru, Asenov, Asen
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2285588
Date:
December, 2013
File:
PDF, 2.22 MB
english, 2013
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