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Chemical vapour deposition of copper or silver from the precursors [M(hfac)(C?NMe)][M = Cu, Ag; hfac = CF3 C(O)CHC(O)CF3]
Yuan, Zheng, Dryden, Neil H., Li, Xiaorong, Vittal, Jagadese J., Puddephatt, Richard J.Volume:
5
Year:
1995
Language:
english
Journal:
Journal of Materials Chemistry
DOI:
10.1039/JM9950500303
File:
PDF, 931 KB
english, 1995