Structure and Mechanical Properties of CrN Thick Films Deposited by High-Rate Medium-Frequency Magnetron Sputtering
Chuansheng, Liu, Hongjun, Wang, Lin, Zhou, Rui, Zhang, Canxin, Tian, Ming, Li, Dejun, FuVolume:
12
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/12/4/12
Date:
August, 2010
File:
PDF, 5.22 MB
english, 2010