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System on chip thermal vacuum sensor based on standard CMOS process
Jinfeng, Li, Zhen'an, Tang, Jiaqi, WangVolume:
30
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/30/3/035004
Date:
March, 2009
File:
PDF, 288 KB
english, 2009