A new model for squeeze-film damping of electrically actuated microbeams under the effect of a static deflection
Li, Pu, Hu, Rufu, Fang, YumingVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/005
Date:
July, 2007
File:
PDF, 304 KB
english, 2007