Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling
Savenko, Alexey, Yildiz, Izzet, Petersen, Dirch Hjorth, Bøggild, Peter, Bartenwerfer, Malte, Krohs, Florian, Oliva, Maria, Harzendorf, TorstenVolume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/46/465701
Date:
November, 2013
File:
PDF, 913 KB
english, 2013