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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - Development of a NIR microspectrometer based on a MOEMS scanning grating
Zimmer, Fabian, Grueger, Heinrich, Heberer, Andreas, Wolter, Alexander, Schenk, Harald, Urey, Hakan, El-Fatatry, AymanVolume:
5455
Year:
2004
Language:
english
DOI:
10.1117/12.544638
File:
PDF, 807 KB
english, 2004