A simple analysis of an inductive RF discharge

Plasma Sources Science and Technology 1992 / 08 Vol. 1; Iss. 3

A simple analysis of an inductive RF discharge

Piejak, R B, Godyak, V A, Alexandrovich, B M
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Volume:
1
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/1/3/006
Date:
August, 1992
File:
PDF, 613 KB
english, 1992
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