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Cc, Cs, and parasitic correction in quadrupole probe-forming lenses
Martin, Frederick W.Volume:
125
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2013.08.013
Date:
February, 2014
File:
PDF, 399 KB
english, 2014