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Applications of HIPIMS metal oxides
Sittinger, V., Lenck, O., Vergöhl, M., Szyszka, B., Bräuer, G.Volume:
548
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.08.087
Date:
December, 2013
File:
PDF, 1.98 MB
english, 2013